USE OF PERFLUOROKETONES AS VAPOR REACTOR CLEANING, ETCHING, AND DOPING GASES

Details for Australian Patent Application No. 2002248603 (hide)

Owner 3M INNOVATIVE PROPERTIES COMPANY

Inventors KESARI, Susrut; BEHR, Frederick E.; COSTELLO, Michael G.; FLYNN, Richard M.; MINDAY, Richard M.; OWENS, John G.; VITCAK, Daniel R.

Pub. Number AU-A-2002248603

PCT Pub. Number WO2002/086192

Priority 09/841,376 24.04.01 US

Filing date 14 March 2002

Wipo publication date 5 November 2002

International Classifications

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

H01L 021/311 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23F 004/00 Processes for removing metallic material from surfaces, not provided for in group or

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 014/56 Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

Event Publications

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002248603

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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