TRAP APPARATUS AND METHOD FOR CONDENSABLE BY-PRODUCTS OF DEPOSITION REACTIONS

Details for Australian Patent Application No. 2002248573 (hide)

Owner MKS INSTRUMENTS, INC.

Inventors GU, Youfan

Pub. Number AU-A-2002248573

PCT Pub. Number WO2002/076581

Priority 09/816,639 23.03.01 US

Filing date 8 March 2002

Wipo publication date 8 October 2002

International Classifications

B01D 053/00 Separation of gases or vapours

B01D 045/08 Separating dispersed particles from gases or vapours

B01D 008/00 Cold traps

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002248573

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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