METHOD OF PLASMA ETCHING ORGANIC ANTIREFLECTIVE COATING

Details for Australian Patent Application No. 2002248539 (hide)

Owner LAM RESEARCH CORPORATION

Inventors NI, Tuqiang; JIANG, Weinan; CHIANG, Conan; LIN, Frank, Y.; LEE, Chris; LEE, Dai, N.

Pub. Number AU-A-2002248539

PCT Pub. Number WO2002/080234

Priority 09/820,737 30.03.01 US

Filing date 21 March 2002

Wipo publication date 15 October 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002248539

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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