ALKALI METAL-CONTAINING POLISHING SYSTEM AND METHOD

Details for Australian Patent Application No. 2002248463 (hide)

Owner CABOT MICROELECTRONICS CORPORATION

Inventors SCHROEDER, David, J.; CHAMBERLAIN, Jeffrey, P.; MUELLER, Brian, L.; CARTER, Phillip; BOGUSH, Gregory, H.; DE REGE THESAURO, Francesco

Pub. Number AU-A-2002248463

PCT Pub. Number WO2002/061008

Priority 60/261,926 16.01.01 US

Filing date 14 January 2002

Wipo publication date 12 August 2002

International Classifications

C09G 001/02 Polishing compositions

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002248463

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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