ION SOURCE FOR ION IMPLANTATION

Details for Australian Patent Application No. 2002248397 (hide)

Owner SEMEQUIP, INC.

Inventors HORSKY, Thomas, N.

Pub. Number AU-A-2002248397

PCT Pub. Number WO2002/063653

Priority 60/267,260 07.02.01 US

Filing date 5 February 2002

Wipo publication date 19 August 2002

International Classifications

H01J 027/00 Ion beam tubes

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002248397

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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