METHOD AND APPARATUS FOR AUTOMATICALLY GENERATING SCHEDULES FOR WAFER PROCESSING WITHIN A MULTICHAMBER SEMICONDUCTOR WAFER PROCESSING TOOL

Details for Australian Patent Application No. 2002248386 (hide)

Owner APPLIED MATERIALS, INC.

Inventors JEVTIC, Dusan B.

Pub. Number AU-A-2002248386

PCT Pub. Number WO2002/059704

Priority 09/771,254 26.01.01 US

Filing date 28 January 2002

Wipo publication date 6 August 2002

International Classifications

G05B 019/418 Programme-control systems - Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control (DNC), flexible manufacturing systems (FMS), integrated manufacturing systems (IMS), computer integrated manufacturing (CIM)

Event Publications

6 February 2003 Application Open to Public Inspection

  Published as AU-A-2002248386

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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