SEMICONDUCTOR DEVICE WITH HIGHER OXYGEN (O2) CONCENTRATION WITHIN WINDOW LAYERS AND METHOD FOR MAKING

Details for Australian Patent Application No. 2002248199 (hide)

Owner MIDWEST RESEARCH INSTITUTE

Inventors WU, Xuanzhi; DHERE, Ramesh

Pub. Number AU-A-2002248199

PCT Pub. Number WO2003/052837

Filing date 13 December 2001

Wipo publication date 30 June 2003

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

28 August 2003 Application Open to Public Inspection

  Published as AU-A-2002248199

2 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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