JOINED CERAMIC ARTICLE, SUBSTRATE HOLDING STRUCTURE AND APPARATUS FOR TREATING SUBSTRATE

Details for Australian Patent Application No. 2002248011 (hide)

Owner SUMITOMO ELECTRIC INDUSTRIES, LTD.

Inventors NATSUHARA, Masuhiro; NAKATA, Hirohiko; KUIBIRA, Akira

Pub. Number AU-A-2002248011

PCT Pub. Number WO2002/083596

Priority 2001-115762 13.04.01 JP

Filing date 11 April 2002

Wipo publication date 28 October 2002

International Classifications

C04B 037/00 Joining burned ceramic articles with other burned ceramic articles or other articles by heating

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002248011

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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