Differential stress reduction in thin films

Details for Australian Patent Application No. 2002247566 (hide)

Owner Silverbrook Research Pty. Ltd.

Inventors Silverbrook, Kia

Agent Silverbrook Research Pty. Ltd.

Pub. Number AU-B-2002247566

PCT Pub. Number WO2003/045836

Priority PR 9197 30.11.01 AU

Filing date 2 May 2002

Wipo publication date 10 June 2003

Acceptance publication date 5 May 2005

International Classifications

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

C30B 029/68 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

21 August 2003 Application Open to Public Inspection

  Published as AU-B-2002247566

5 May 2005 Application Accepted

  Published as AU-B-2002247566

1 September 2005 Standard Patent Sealed

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