SYSTEM AND METHOD FOR CONTROLLING DEPOSITION THICKNESS

Details for Australian Patent Application No. 2002247329 (hide)

Owner 4WAVE, INC.

Inventors HYLTON, Todd, Lanier; BALDWIN, David, Alan

Pub. Number AU-A-2002247329

PCT Pub. Number WO2002/075017

Priority 09/810,720 16.03.01 US

Filing date 13 March 2002

Wipo publication date 3 October 2002

International Classifications

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

G02B 026/00 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating

G02F 001/00 Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002247329

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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