APPARATUS AND METHOD FOR ISOLATING AND MEASURING MOVEMENT IN A METROLOGY APPARATUS

Details for Australian Patent Application No. 2002247291 (hide)

Owner VEECO INSTRUMENTS, INC.

Inventors MASSIE, James, R.

Pub. Number AU-A-2002247291

PCT Pub. Number WO2002/073125

Priority 09/803,268 09.03.01 US; 09/855,960 15.05.01 US

Filing date 8 March 2002

Wipo publication date 24 September 2002

International Classifications

G01B 009/04 Instruments as specified in the subgroups and characterised by the use of optical measuring means - Measuring microscopes

G01B 005/28 Measuring arrangements characterised by the use of mechanical means - for measuring roughness or irregularity of surfaces

G01N 013/16 Investigating surface or boundary effects, e.g. wetting power

Event Publications

20 March 2003 Application Open to Public Inspection

  Published as AU-A-2002247291

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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