SYSTEM AND METHOD FOR AMPLIFYING AN ANGLE OF DIVERGENCE OF A SCANNED ION BEAM

Details for Australian Patent Application No. 2002247083 (hide)

Owner PROTEROS, LLC

Inventors ENGE, Harald; BERRIAN, Donald, W.

Pub. Number AU-A-2002247083

PCT Pub. Number WO2002/063654

Priority 60/266,672 06.02.01 US

Filing date 6 February 2002

Wipo publication date 19 August 2002

International Classifications

H01J 037/147 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Arrangements for directing or deflecting the discharge along a desired path

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002247083

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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