CARRIER HEAD FOR HOLDING A WAFER AND ALLOWING PROCESSING ON A FRONT FACE THEREOF TO OCCUR

Details for Australian Patent Application No. 2002246989 (hide)

Owner NUTOOL, INC.

Inventors BASOL, Bulent, M.; UZOH, Cyprian, E.; VOLODARSKY, Konstantin

Pub. Number AU-A-2002246989

PCT Pub. Number WO2002/059947

Priority 60/260,681 11.01.01 US

Filing date 10 January 2002

Wipo publication date 6 August 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 February 2003 Application Open to Public Inspection

  Published as AU-A-2002246989

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002246990-SNOWBOARD BOOT WITH REMOVABLE FORWARD SUPPORT

2002246988-VARIABLE OPTIC ATTENUATOR BY WAVEGUIDE BEND LOSS