AMMONIUM OXALATE-CONTAINING POLISHING SYSTEM AND METHOD

Details for Australian Patent Application No. 2002246942 (hide)

Owner CABOT MICROELECTRONICS CORPORATION

Inventors HAWKINS, Joseph, D.; ZHOU, Renjie; CHOU, Homer

Pub. Number AU-A-2002246942

PCT Pub. Number WO2002/061810

Priority 60/261,928 16.01.01 US

Filing date 4 January 2002

Wipo publication date 12 August 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C09G 001/02 Polishing compositions

C09K 003/14 Materials not provided for elsewhere - Anti-slip materials

H01L 021/321 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

C09G 001/00 Polishing compositions

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002246942

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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