NON-PLASMA $M(F)I$M(G)IN SITU$M(F)/I$M(G) CLEANING OF PROCESSING CHAMBERS USING STATIC FLOW METHODS

Details for Australian Patent Application No. 2002246896 (hide)

International Classifications

Event Publications

6 February 2003 Application Open to Public Inspection

Published as AU-A-2002246896

29 January 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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