Magnetic field furnace and a method of using the same to manufacture semiconductor substrates

Details for Australian Patent Application No. 2002246865 (hide)

International Classifications

Event Publications

6 February 2003 Application Open to Public Inspection

Published as AU-B-2002246865

8 July 2004 Assignment before Grant

Ebara Solar, Inc. The application has been assigned to Ebara Corporation

9 November 2006 Application Accepted

Published as AU-B-2002246865

8 March 2007 Standard Patent Sealed

23 July 2009 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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