INTEGRATION OF ORGANIC FILL FOR DUAL DAMASCENE PROCESS

Details for Australian Patent Application No. 2002246780 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors OKADA, Lynne, A.; WANG, Fei; YANG, James, K.

Pub. Number AU-A-2002246780

PCT Pub. Number WO2002/061823

Priority 60/265,076 31.01.01 US; 09/892,750 28.06.01 US

Filing date 19 December 2001

Wipo publication date 12 August 2002

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002246780

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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