METHOD OF EFFICIENT CONTROLLABLE AND REPEATABLE WET OXIDATION IN A PHOSPHOROUS-RICH III-V MATERIAL SYSTEM

Details for Australian Patent Application No. 2002246606 (hide)

Owner DAGENAIS, Mario

Inventors KOLEY, Bikash; JOHNSON, Frederick, G.; DAGENAIS, Mario

Pub. Number AU-A-2002246606

PCT Pub. Number WO2002/054482

Priority 60/254,787 13.12.00 US

Filing date 12 December 2001

Wipo publication date 16 July 2002

International Classifications

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01S 005/183 Semiconductor lasers

H01S 005/20 Semiconductor lasers

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002246606

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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