METHOD FOR FABRICATION OF SILICON OCTOPOLE DEFLECTORS AND ELECTRON COLUMN EMPLOYING SAME

Details for Australian Patent Application No. 2002245660 (hide)

Owner APPLIED MATERIALS INC.

Inventors GMUR, Max

Pub. Number AU-A-2002245660

PCT Pub. Number WO2002/070401

Priority 09/800,797 07.03.01 US

Filing date 6 March 2002

Wipo publication date 19 September 2002

International Classifications

B81B 001/00 Devices without movable or flexible elements, e.g. micro-capillary devices

H01J 037/30 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Electron-beam or ion-beam tubes for localised treatment of objects

Event Publications

13 March 2003 Application Open to Public Inspection

  Published as AU-A-2002245660

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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