HALOGENATED ANTI-REFLECTIVE COATINGS

Details for Australian Patent Application No. 2002245460 (hide)

Owner BREWER SCIENCE, INC.

Inventors ENOMOTO, Tomoyuki; MIZUSAWA, Ken-Ichi; ARASE, Shin-Ya; PULIGADDA, Rama

Pub. Number AU-A-2002245460

PCT Pub. Number WO2003/075093

Filing date 11 February 2002

Wipo publication date 16 September 2003

International Classifications

G03F 007/004 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Photosensitive materials

C08F 220/12 Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide, or nitrile thereof

G03F 007/26 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Processing photosensitive materials

C08F 018/00 Homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an acyloxy radical of a saturated carboxylic acid, of carbonic acid, or of a haloformic acid

C08F 018/16 Homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an acyloxy radical of a saturated carboxylic acid, of carbonic acid, or of a haloformic acid

Event Publications

23 October 2003 Application Open to Public Inspection

  Published as AU-A-2002245460

28 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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