OPTICAL MONITORING IN OPTICAL INTERFEROMETRIC MODULATORS

Details for Australian Patent Application No. 2002245241 (hide)

Owner ASML US, INC

Inventors HAJJAR, Roger

Pub. Number AU-A-2002245241

PCT Pub. Number WO2002/056098

Priority 60/260,581 09.01.01 US; 09/797,783 01.03.01 US

Filing date 9 January 2002

Wipo publication date 24 July 2002

International Classifications

G02F 001/035 Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating

Event Publications

6 February 2003 Application Open to Public Inspection

  Published as AU-A-2002245241

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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