SOI/GLASS PROCESS FOR FORMING THIN SILICON MICROMACHINED STRUCTURES

Details for Australian Patent Application No. 2002245176 (hide)

Owner HONEYWELL INTERNATIONAL INC.

Inventors CABUZ, Cleopatra; RIDLEY, Jeffrey, Alan

Pub. Number AU-A-2002245176

PCT Pub. Number WO2002/057180

Priority 09/748,488 27.12.00 US

Filing date 20 December 2001

Wipo publication date 30 July 2002

International Classifications

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002245176

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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