SEMICONDUCTOR ETCH STOP AND DIFFUSION BARRIER

Details for Australian Patent Application No. 2002245124 (hide)

Owner VRAM TECHNOLOGIES, LLC

Inventors METZLER, Richard, A.

Pub. Number AU-A-2002245124

PCT Pub. Number WO2002/056358

Priority 09/712,449 13.11.00 US; 09/982,855 22.10.01 US

Filing date 2 November 2001

Wipo publication date 24 July 2002

International Classifications

H01L 021/329 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/28 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 February 2003 Application Open to Public Inspection

  Published as AU-A-2002245124

29 January 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002245125-BIOPSY AND COAGULANT DEVICE

2002245123-Heterocyclic sulfonamide inhibitors of beta amyloid production