LOW CONTAMINATION PLASMA CHAMBER COMPONENTS AND METHODS FOR MAKING THE SAME

Details for Australian Patent Application No. 2002245088 (hide)

Owner LAM RESEARCH CORPORATION

Inventors CHANG, Christopher, C.; SEGER, Robert, J.

Pub. Number AU-A-2002245088

PCT Pub. Number WO2002/057506

Priority 09/749,917 29.12.00 US

Filing date 13 December 2001

Wipo publication date 30 July 2002

International Classifications

C23C 004/04 Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge - characterised by the coating material

C23C 004/10 Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge - Oxides, borides, carbides, nitrides, silicides or mixtures thereof

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002245088

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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