SPINODAL COPPER ALLOY ELECTRODES

Details for Australian Patent Application No. 2002245061 (hide)

Owner CYMER, INC.

Inventors MORTON, Richard, G.

Pub. Number AU-A-2002245061

PCT Pub. Number WO2002/058199

Priority 09/703,697 01.11.00 US; 09/776,044 01.02.01 US

Filing date 30 October 2001

Wipo publication date 30 July 2002

International Classifications

H01S 003/22 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

H01S 003/097 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - by gas discharge of a gas laser

H01S 003/223 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002245061

29 January 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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