MULTIPLE CHAMBER FLUID MOUNT

Details for Australian Patent Application No. 2002244918 (hide)

Owner NIKON CORPORATION

Inventors WATSON, Douglas, C.; BINNARD, Michael

Pub. Number AU-A-2002244918

PCT Pub. Number WO2002/077485

Priority 09/818,163 27.03.01 US

Filing date 26 March 2002

Wipo publication date 8 October 2002

International Classifications

F16F 009/18 Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

H01L 021/30 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002244918

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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