LINE PROFILE ASYMMETRY MEASUREMENT USING SCATTEROMETRY

Details for Australian Patent Application No. 2002244225 (hide)

Owner ACCENT OPTICAL TECHNOLOGIES, INC.

Inventors RAYMOND, Christopher, J.

Pub. Number AU-A-2002244225

PCT Pub. Number WO2002/070985

Priority 60/273,039 02.03.01 US

Filing date 28 February 2002

Wipo publication date 19 September 2002

International Classifications

G01B 011/02 Measuring arrangements characterised by the use of optical means - for measuring length, width, or thickness

Event Publications

13 March 2003 Application Open to Public Inspection

  Published as AU-A-2002244225

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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