PROCESS VESSEL WITH ROTATION OF MICROELECTRONIC WORKPIECES

Details for Australian Patent Application No. 2002244101 (hide)

Owner SEMITOOL, INC.

Inventors SCRANTON, Dana, R.

Pub. Number AU-A-2002244101

PCT Pub. Number WO2002/069365

Priority 09/795,776 27.02.01 US

Filing date 21 February 2002

Wipo publication date 12 September 2002

International Classifications

H01J 037/00 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

6 March 2003 Application Open to Public Inspection

  Published as AU-A-2002244101

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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