ALLEVIATING LINE END SHORTENING IN TRANSISTOR ENDCAPS BY EXTENDING PHASE SHIFTERS

Details for Australian Patent Application No. 2002243967 (hide)

Owner NUMERICAL TECHNOLOGIES, INC.

Inventors MA, Melody; LIU, Hua-Yu

Pub. Number AU-A-2002243967

PCT Pub. Number WO2002/082182

Priority 60/281,325 03.04.01 US; 09/872,620 31.05.01 US

Filing date 11 February 2002

Wipo publication date 21 October 2002

International Classifications

G03F 001/00 Preparation of originals for the photomechanical production of textured or patterned surfaces

Event Publications

10 April 2003 Application Open to Public Inspection

  Published as AU-A-2002243967

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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