METHOD FOR FORMING MICROELECTRONIC SPRING STRUCTURES ON A SUBSTRATE

Details for Australian Patent Application No. 2002243937 (hide)

Owner FORMFACTOR, INC.

Inventors WENZEL, Stuart, W.; ELDRIDGE, Benjamin, N.

Pub. Number AU-A-2002243937

PCT Pub. Number WO2002/064496

Priority 09/781,833 12.02.01 US

Filing date 6 February 2002

Wipo publication date 28 August 2002

International Classifications

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

H01L 023/48 Details of semiconductor or other solid state devices - Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads or terminal arrangements

G01R 001/073 Details of instruments or arrangements of the types included in groups and - Multiple probes

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002243937

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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