PROCESSING MATERIALS INSIDE AN ATMOSPHERIC-PRESSURE RADIOFREQUENCY NONTHERMAL PLASMA DISCHARGE

Details for Australian Patent Application No. 2002243756 (hide)

Owner THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventors HENINS, Ivars; HERRMANN, Hans, W.; PARK, Jaeyoung; SELWYN, Gary, S.

Pub. Number AU-A-2002243756

PCT Pub. Number WO2002/063066

Priority 09/776,086 02.02.01 US

Filing date 31 January 2002

Wipo publication date 19 August 2002

International Classifications

C23C 016/503 Chemical deposition or plating by decomposition

C23C 016/505 Chemical deposition or plating by decomposition

C23C 016/507 Chemical deposition or plating by decomposition

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002243756

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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