STEADY STATE METHOD FOR MEASURING THE THICKNESS AND THE CAPACITANCE OF ULTRA THIN DIELECTRIC IN THE PRESENCE OF SUBSTANTIAL LEAKAGE CURRENT

Details for Australian Patent Application No. 2002243685 (hide)

Owner SEMICONDUCTOR DIAGNOSTICS, INC.

Inventors SAVTCHOUK, Alexander; LAGOWSKI, Jacek; D'AMICO, John; WILSON, Marshall, D.; JASTREZEBSKI, Lubomir, L.

Pub. Number AU-A-2002243685

PCT Pub. Number WO2002/059631

Priority 60/264,571 26.01.01 US; 09/810,789 16.03.01 US; 09/851,291 08.05.01 US

Filing date 25 January 2002

Wipo publication date 6 August 2002

International Classifications

G01R 031/26 Arrangements for testing electric properties - Testing of individual semiconductor devices

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

Event Publications

6 February 2003 Application Open to Public Inspection

  Published as AU-A-2002243685

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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