A METHOD FOR MAKING FILMS UTILIZING A PULSED LASER FOR ION INJECTION AND DEPOSITION

Details for Australian Patent Application No. 2002243574 (hide)

Owner RESEARCH FOUNDATION OF THE CITY UNIVERSITY OF NEW YORK

Inventors CADIEU, Fred, J.

Pub. Number AU-A-2002243574

PCT Pub. Number WO2002/057507

Priority 60/262,051 17.01.01 US

Filing date 16 January 2002

Wipo publication date 30 July 2002

International Classifications

C23C 014/28 Coating by vacuum evaporation, by sputtering or by ion implantation - by wave energy or particle radiation

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002243574

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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