A METHOD FOR FABRICATION OF A HIGH CAPACITANCE INTERPOLY DIELECTRIC

Details for Australian Patent Application No. 2002243516 (hide)

Owner ATMEL CORPORATION

Inventors GOOD, Mark, A.; KELKAR, Amit, S.

Pub. Number AU-A-2002243516

PCT Pub. Number WO2002/080235

Priority 09/821,365 28.03.01 US

Filing date 10 January 2002

Wipo publication date 15 October 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002243516

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002243517-OPTICAL PROBE HAVING AND METHODS FOR DIFUSE AND UNIFORM LIGHT IRRADIATION

2002243515-SMALL BUILDING AUTOMATION CONTROL SYSTEM