METHOD FOR MICROFABRICATING STRUCTURES USING SILICONON-INSULATOR MATERIAL

Details for Australian Patent Application No. 2002243450 (hide)

Owner THE CHARLES STARK DRAPER LABORATORY, INC.

Inventors BORENSTEIN, Jeffrey

Pub. Number AU-A-2002243450

PCT Pub. Number WO2002/054475

Priority 60/259,282 02.01.01 US

Filing date 2 January 2002

Wipo publication date 16 July 2002

International Classifications

H01L 021/46 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23F 001/00 Etching metallic material by chemical means

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002243450

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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