CAPILLARY DISCHARGE PLASMA APPARATUS AND METHOD FOR SURFACE TREATMENT USING THE SAME

Details for Australian Patent Application No. 2002242220 (hide)

Owner PLASMION CORPORATION

Inventors KIM, Steven; YU, Dong, Woo; SONG, Seok-Kyun; KIM, Seungdeok

Pub. Number AU-A-2002242220

PCT Pub. Number WO2002/071438

Priority 09/796,488 02.03.01 US

Filing date 21 February 2002

Wipo publication date 19 September 2002

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

13 March 2003 Application Open to Public Inspection

  Published as AU-A-2002242220

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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