FOCUSED MAGNETRON SPUTTERING SYSTEM
Details for Australian Patent Application No. 2002242092 (hide)
Event Publications
20 February 2003 Application Open to Public Inspection
Published as AU-A-2002242092
12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired
This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.
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