USING SCATTEROMETRY TO DEVELOP REAL TIME ETCH IMAGE

Details for Australian Patent Application No. 2002242062 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors SUBRAMANIAN, Ramkumar; RANGARAJAN, Bharath; SINGH, Bhanwar; TEMPLETON, Michael, K.

Pub. Number AU-A-2002242062

PCT Pub. Number WO2003/002990

Priority 09/893,186 27.06.01 US; 09/893,271 27.06.01 US

Filing date 31 January 2002

Wipo publication date 3 March 2003

International Classifications

G01N 021/47 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Scattering, i.e. diffuse reflection

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002242062

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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