FUSED SILICA PELLICLE

Details for Australian Patent Application No. 2002241929 (hide)

Owner PHOTRONICS, INC.

Inventors EYNON, Ben

Pub. Number AU-A-2002241929

PCT Pub. Number WO2002/057852

Priority 09/766,907 22.01.01 US

Filing date 18 January 2002

Wipo publication date 30 July 2002

International Classifications

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

G03F 001/14 Preparation of originals for the photomechanical production of textured or patterned surfaces - Originals characterised by structural details, e.g. supports, cover layers, pellicle rings

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002241929

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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