SOI DEVICES WITH INTEGRATED GETTERING STRUCTURE

Details for Australian Patent Application No. 2002241650 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors MANDELMAN, Jack, A.; GAMBINO, Jeffrey, P.; LASKY, Jerome, B.; RADENS, Carl, J.; VOLDMAN, Steven, H.

Pub. Number AU-A-2002241650

PCT Pub. Number WO2002/080266

Priority 09/822,431 30.03.01 US

Filing date 19 December 2001

Wipo publication date 15 October 2002

International Classifications

H01L 021/76 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/36 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/265 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 027/01 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate -

H01L 027/12 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - the substrate being other than a semiconductor body, e.g. an insulating body

H01L 031/0392 Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation

H01L 021/322 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002241650

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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