PROBE CARTRIDGE ASSEMBLY AND MULTI-PROBE ASSEMBLY

Details for Australian Patent Application No. 2002241566 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors FINK, Steven, T.; WINDHORN, Thomas, H.

Pub. Number AU-A-2002241566

PCT Pub. Number WO2002/052285

Priority 60/257,237 22.12.00 US

Filing date 20 December 2001

Wipo publication date 8 July 2002

International Classifications

G01R 027/00 Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002241566

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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