CLUSTER TOOL AND METHOD FOR CONTROLLING TRANSPORT

Details for Australian Patent Application No. 2002241352 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors TAKAHASHI, Keiko; OBI, Akira; IIJIMA, Kiyohito; KAISE, Seiichi

Pub. Number AU-A-2002241352

PCT Pub. Number WO2002/084731

Priority 2001-108926 06.04.01 JP

Filing date 2 April 2002

Wipo publication date 28 October 2002

International Classifications

H01L 021/68 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002241352

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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