SHOWER HEAD GAS INJECTION APPARATUS WITH SECONDARY HIGH PRESSURE PULSED GAS INJECTION

Details for Australian Patent Application No. 2002240262 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors STRANG, Eric, J.

Pub. Number AU-A-2002240262

PCT Pub. Number WO2002/071463

Priority 60/272,452 02.03.01 US

Filing date 26 February 2002

Wipo publication date 19 September 2002

International Classifications

H01L 021/3065 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C23C 016/455 Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

Event Publications

13 March 2003 Application Open to Public Inspection

  Published as AU-A-2002240262

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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