APPARATUS AND METHOD FOR REACTIVE ATOM PLASMA PROCESSING FOR MATERIAL DEPOSITION

Details for Australian Patent Application No. 2002240171 (hide)

Owner RAPT INDUSTRIES INC.

Inventors CARR, Jeffrey, W.

Pub. Number AU-A-2002240171

PCT Pub. Number WO2003/041146

Priority 10/008,236 07.11.01 US

Filing date 30 January 2002

Wipo publication date 19 May 2003

International Classifications

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

24 July 2003 Application Open to Public Inspection

  Published as AU-A-2002240171

22 July 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002240172-METHOD AND APPARATUS FOR DESKEWING MULTIPLE INCOMING SIGNALS

2002240170-Microbial resistant water purification and collection system