ION BEAM COLLIMATOR SYSTEM

Details for Australian Patent Application No. 2002239682 (hide)

Owner PROTEROS, LLC

Inventors ENGE, Harald

Pub. Number AU-A-2002239682

PCT Pub. Number WO2002/054442

Priority 60/258,844 28.12.00 US

Filing date 28 December 2001

Wipo publication date 16 July 2002

International Classifications

H01J 037/14 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

H01J 037/30 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Electron-beam or ion-beam tubes for localised treatment of objects

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002239682

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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