METHOD OF ENHANCED OXIDATION OF MOS TRANSISTOR GATE CORNERS

Details for Australian Patent Application No. 2002239671 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors DOKUMACI, Omer; GLUSCHENKOV, Oleg; HEDGE, Suryanarayan, G.; KAPLAN, Richard; KHARE, Mukesh

Pub. Number AU-A-2002239671

PCT Pub. Number WO2002/089180

Priority 09/844,977 27.04.01 US

Filing date 27 December 2001

Wipo publication date 11 November 2002

Event Publications

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002239671

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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