Owner MOTOROLA, INC.

Inventors TRAYLOR, Kevin B.,; RABE, Duane C.,; JOHNSON, Timothy Joe,

Pub. Number AU-A-2002239666

PCT Pub. Number WO2002/099887

Priority 09/870,832 01.06.01 US

Filing date 27 December 2001

Wipo publication date 16 December 2002

H01L 027/15 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - including semiconductor components with at least one potential-jump barrier or surface barrier, specially adapted for light emission

H01L 027/14 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/8258 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 027/06 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - including a plurality of individual components in a non-repetitive configuration