MEMS MIRRORS WITH PRECISION CLAMPING MECHANISM

Details for Australian Patent Application No. 2002239599 (hide)

Owner ONIX MICROSYSTEMS

Inventors KOBRIN, Boris; CHAPARALA, Murali; ZALEWSKI, Gary; BEHIN, Behrang; DANEMAN, Michael; LIN, Chuang-Chia

Pub. Number AU-A-2002239599

PCT Pub. Number WO2002/084374

Priority 09/834,744 12.04.01 US; 09/835,115 13.04.01 US

Filing date 13 December 2001

Wipo publication date 28 October 2002

International Classifications

G02B 026/08 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating - for controlling the direction of light

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

H01L 041/00 Piezo-electric elements in general

G02B 026/02 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating - for controlling the intensity of light

H01H 001/00 Electric switches

Event Publications

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002239599

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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