PHASE SHIFT MASK AND SYSTEM AND METHOD FOR MAKING THE SAME

Details for Australian Patent Application No. 2002239503 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors LUKANC, Todd

Pub. Number AU-A-2002239503

PCT Pub. Number WO2002/061504

Priority 09/772,577 30.01.01 US

Filing date 3 December 2001

Wipo publication date 12 August 2002

International Classifications

G03F 001/00 Preparation of originals for the photomechanical production of textured or patterned surfaces

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002239503

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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