A SELF-CLEANING OPTIC FOR EXTREME ULTRAVIOLET LITHOGRAPHY

Details for Australian Patent Application No. 2002239385 (hide)

Owner EUV LIMITED LIABILITY CORPORATION

Inventors KLEBANOFF, Leonard, E.; STULEN, Richard, H.

Pub. Number AU-A-2002239385

PCT Pub. Number WO2002/054115

Priority 09/754,869 03.01.01 US

Filing date 12 December 2001

Wipo publication date 16 July 2002

International Classifications

G02B 001/00 Optical elements characterised by the material of which they are made

Event Publications

23 January 2003 Application Open to Public Inspection

  Published as AU-A-2002239385

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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